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Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition Process With Residency Time Constraints.
FaJun Yang
Naiqi Wu
Yan Qiao
MengChu Zhou
ZhiWu Li
Published in:
IEEE Trans. Syst. Man Cybern. Syst. (2017)
Keyphrases
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neural network
end users
constraint satisfaction
data clustering
scheduling algorithm
resource constraints
constrained clustering
genetic algorithm
clustering algorithm
scheduling problem
user friendly
development process