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Efficient Approach to Scheduling of Transient Processes for Time-Constrained Single-Arm Cluster Tools With Parallel Chambers.

FaJun YangYan QiaoKaizhou GaoNaiqi WuYuting ZhuIan Ware SimonRong Su
Published in: IEEE Trans. Syst. Man Cybern. Syst. (2020)
Keyphrases
  • clustering algorithm
  • scheduling problem
  • parallel execution
  • decision support
  • cluster analysis
  • neural network
  • genetic algorithm
  • data points
  • data clustering
  • parallel machines
  • round robin
  • identical machines