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Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry.

FaJun YangNaiqi WuYan QiaoMengChu Zhou
Published in: ICNSC (2016)
Keyphrases
  • optimal scheduling
  • lightweight
  • information retrieval
  • user friendly
  • data sets
  • artificial intelligence
  • case study
  • high dimensional
  • computationally efficient
  • software tools
  • subspace clustering
  • economic development