Petri Net-Based Polynomially Complex Approach to Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Semiconductor Manufacturing.
FaJun YangNaiqi WuYan QiaoMengChu ZhouPublished in: IEEE Trans. Syst. Man Cybern. Syst. (2014)
Keyphrases
- semiconductor manufacturing
- discrete event simulation
- cyclic scheduling
- process control
- production system
- material handling
- optimal solution
- worst case
- complex systems
- hierarchical clustering
- real world
- real time
- software engineering
- state space
- integer programming
- optimal control
- data points
- np hard
- high level
- knowledge base