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Optimal One-Wafer Cyclic Scheduling of Single-Arm Multicluster Tools With Two-Space Buffering Modules.

FaJun YangNaiqi WuYan QiaoMengChu Zhou
Published in: IEEE Trans. Syst. Man Cybern. Syst. (2014)
Keyphrases
  • cyclic scheduling
  • building blocks
  • software tools
  • expert systems
  • knowledge base
  • optimal solution
  • integrated circuit