Fabrication of through silicon via with highly phosphorus-doped polycrystalline Si plugs for driving an active-matrix nanocrystalline Si electron emitter array.
Naokatsu IkegamiTakashi YoshidaAkira KojimaHiroshi MiyaguchiMasanori MuroyamaShinya YoshidaKentaro TotsuNobuyoshi KoshidaMasayoshi EsashiPublished in: NEMS (2016)
Keyphrases
- high density
- si sio
- thin film
- solar cell
- chemical vapor deposition
- metal oxide
- plasma etching
- room temperature
- electron microscopy
- high speed
- x ray
- electrical properties
- gate dielectrics
- solid state
- low density
- data center
- electron beam
- driver assistance systems
- chance discovery
- multi layer
- database replication
- markov chain
- neural network