/Si films.

Ming-Jhang Wu Hua-Chiang Wen Shyh-Chi Wu Ping-Feng Yang Yi-Shao Lai Wen-Kuang Hsu Wen-Fa Wu Chang-Pin Chou

Published in: Microelectron. Reliab. (2011)

Keyphrases

metal oxide
chemical vapor deposition
x ray
si sio
high speed
solid state
high density
thin film
grain size
leakage current
film restoration
electron micrographs
plasma etching
database replication
databases
evolutionary algorithm
ni fe
multi agent systems
search algorithm