Silicon nano-column fabricated by catalytic etching for electrode of fuel cell.
Mao-Jung HuangChun-Ting LinChun-Ming ChangNien-Nan ChuMing-Hua ShiaoChii-Rong YangYuang-Cherng ChiouRong-Tsong LeePublished in: NEMS (2011)
Keyphrases
- fuel cell
- plasma etching
- high speed
- carbon nanotubes
- thin film
- fault detection
- high density
- electron microscopy
- nano scale
- cmos technology
- silicon on insulator
- integrated circuit
- low density
- electric field
- electron beam
- magnetic recording
- neural network
- space charge
- metal oxide semiconductor
- low power
- charge coupled device
- column oriented
- chemical vapor deposition
- semiconductor devices
- transmission electron microscopy
- computational intelligence
- binary matrix
- field effect transistors
- soft computing
- management system
- expert systems
- gallium arsenide
- real time