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An experimental study of the thermally activated processes in polycrystalline silicon thin film transistors.
Loukas Michalas
M. A. Exarchos
George J. Papaioannou
Dimitrios N. Kouvatsos
Apostolos T. Voutsas
Published in:
Microelectron. Reliab. (2007)
Keyphrases
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thin film
high density
solar cell
low density
plasma etching
chemical vapor deposition
short circuit
electron microscopy
infrared
data center
grain size
data mining
film thickness
room temperature
neural network
space charge
multi layer
feed forward
wireless sensor networks
silicon nitride