Fault Diagnosis of Wafer Acceptance Test and Chip Probing Between Front-End-of-Line and Back-End-of-Line Processes.
Shu-Kai S. FanChun-Wei ChengDu-Ming TsaiPublished in: IEEE Trans Autom. Sci. Eng. (2022)
Keyphrases
- back end
- fault diagnosis
- user friendly
- data management
- fault detection and diagnosis
- fault detection
- expert systems
- data types
- electronic equipment
- bp neural network
- neural network
- fuzzy logic
- multiple faults
- building blocks
- chemical process
- rotating machinery
- power transformers
- fault identification
- monitoring and fault diagnosis
- xml documents
- knowledge base