dielectric films for MEMS capacitive switches.

D. Birmpiliotis Matroni Koutsoureli J. Kohylas George J. Papaioannou A. Ziaei

Published in: Microelectron. Reliab. (2018)

Keyphrases

chemical vapor deposition
electrical properties
silicon dioxide
thin film
gate dielectrics
high density
gate insulator
silicon nitride
information systems
grain size
film thickness
dielectric constant
databases
bayesian networks
electron micrographs