J. Kohylas

Publication Activity (10 Years)

Years Active: 2018-2018
Publications (10 Years): 1

Top Topics

Electrical Properties

Silicon Nitride

Gate Dielectrics

Top Venues

Microelectron. Reliab.

Publications

D. Birmpiliotis, Matroni Koutsoureli, J. Kohylas, George J. Papaioannou, A. Ziaei
dielectric films for MEMS capacitive switches. Microelectron. Reliab. (2018)