stacked gate dielectric.

B. L. Yang Hei Wong Kuniyuki Kakushima Hiroshi Iwai

Published in: Microelectron. Reliab. (2012)

Keyphrases

silicon dioxide
gate dielectrics
leakage current
electrical properties
low voltage
nano scale
transmission line
high temperature
genetic algorithm
e learning
image segmentation
multiscale
high density
cmos technology
field effect transistors
chemical vapor deposition