and nitride-oxide dielectrics.

Fen Chen Rolf-Peter Vollertsen Baozhen Li Dave Harmon Wing L. Lai

Published in: Microelectron. Reliab. (2002)

Keyphrases

gate insulator
fuel cell
room temperature
metal oxide
pattern recognition
electron microscopy
si sio
real time
machine learning
high dimensional
metal oxide semiconductor
expert systems
electrical properties
silicon dioxide
leakage current