Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements.
Min XuZhi LiMichael FahrbachErwin PeinerUwe BrandPublished in: Sensors (2021)
Keyphrases
- high speed
- high speed camera
- surface temperature
- multiview reconstruction
- low power
- d objects
- image measurements
- real time
- frame rate
- high speed networks
- surface roughness
- silicon dioxide
- geometrical properties
- si sio
- range data
- surface reconstruction
- high density
- object surface
- free form
- low cost
- optical properties
- surface features
- surface model
- physical models
- space charge
- measurement noise
- measured data
- normal vectors
- charge coupled device
- medical images
- surface registration