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Minimizing hydrogen content in silicon oxynitride by thermal oxidation of silicon-rich silicon nitride.
C. K. Wong
Hei Wong
Mansun Chan
Chi-Wah Kok
H. P. Chan
Published in:
Microelectron. Reliab. (2006)
Keyphrases
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silicon dioxide
transmission electron microscopy
high temperature
chemical vapor deposition
electrical properties
high density
high speed
low cost
plasma etching
high level
thin film
infrared
gallium arsenide
silicon nitride
user generated content
web content
steady state
x ray
neural network