Fabrication and testing of a novel silicon probe for micromachined surface profilers.
Senlin JiangDacheng ZhangLongtao LinZhenchuan YangGuizhen YanPublished in: NEMS (2011)
Keyphrases
- high density
- high speed
- si sio
- semiconductor devices
- three dimensional
- d objects
- plasma etching
- space charge
- surface reconstruction
- low cost
- surface features
- test cases
- smooth surfaces
- silicon dioxide
- silicon on insulator
- object surface
- surface fitting
- integrated circuit
- viewpoint
- surface orientation
- light source
- low density
- software development
- medical images
- high resolution