dc-Conduction mechanism in lanthanum-manganese oxide films grown on p-Si substrate.

Published in: Microelectron. Reliab. (2008)

Keyphrases

electrical properties
metal oxide
silicon nitride
film thickness
rf sputtering
thin film
leakage current
si sio
silicon dioxide
x ray
magnetic field
solid state
solar cell
gate dielectrics
space charge
chemical vapor deposition
computational model
low voltage
electron microscopy
selection mechanism