Investigating Stability of Si Sphere Surface Layer in Ambient-Vacuum Cyclic Measurements Using Ellipsometry.
Kazuaki FujitaKenichi FujiiLulu ZhangYasushi AzumaShigeki MizushimaNaoki KuramotoPublished in: IEEE Trans. Instrum. Meas. (2022)
Keyphrases
- si sio
- surface roughness
- unit sphere
- surface temperature
- multiview reconstruction
- ambient intelligence
- three dimensional
- silicon dioxide
- multi layer
- image measurements
- lambertian surface
- stability analysis
- surface reconstruction
- shape reconstruction
- physical models
- low energy electron
- surface features
- free form
- d objects
- shape index
- reconstruction method
- leakage current
- metal oxide
- surface geometry
- application layer
- measured data
- surface model
- geometrical properties
- intelligent environments
- photometric stereo
- vector field