polyoxide deposited on polycrystalline silicon.

Chyuan Haur Kao T. C. Chan Kung Shao Chen Yu-Teng Chung Wen-Shih Luo

Published in: Microelectron. Reliab. (2010)

Keyphrases

chemical vapor deposition
thin film
silicon nitride
electrical properties
gate dielectrics
high density
solar cell
electron microscopy
si sio
plasma etching
film thickness
multi layer
neural network
transmission electron microscopy
search algorithm
leakage current
information systems