dielectric films used in RF MEMS capacitive switches.

Matroni Koutsoureli Loukas Michalas E. Papandreou George J. Papaioannou

Published in: Microelectron. Reliab. (2015)

Keyphrases

rf sputtering
chemical vapor deposition
magnetic field
electrical properties
silicon dioxide
gate dielectrics
thin film
high density
radio frequency
relevance feedback
gate insulator
real time
databases
neural network
data mining
decision trees