Fabrication and performance analysis of an amorphous silicon-based thermal IR detector.
Hyun Oh KangZhao ZhiguoSeong Ki JeonHo JungHak-Rin KimDae-Hyuk KwonJung-Hee LeeShin-Won KangSeong-Ho KongPublished in: NEMS (2010)
Keyphrases
- thin film
- high density
- plasma etching
- electrical properties
- room temperature
- information retrieval
- semiconductor devices
- high speed
- chemical vapor deposition
- query expansion
- low density
- text retrieval
- infrared
- gate dielectrics
- information retrieval systems
- data center
- low cost
- detection method
- information access
- power plant
- charge coupled device
- ir evaluation
- electron beam
- integrated circuit
- evaluation measures
- detection algorithm
- silicon on insulator
- real time
- cross language ir
- relevance feedback
- thermal images
- visible spectrum
- interest point detectors
- web information retrieval
- finite element analysis
- retrieval effectiveness
- retrieval model