Latent gate oxide defects case studies.
Julien GoxeC. AboudaBéatrice VanhuffelPublished in: Microelectron. Reliab. (2015)
Keyphrases
- case study
- leakage current
- silicon dioxide
- field effect transistors
- lessons learned
- defect detection
- open source
- latent variables
- electron microscopy
- real world
- low voltage
- room temperature
- nano scale
- steady state
- fuel cell
- thin film transistor
- liquid crystal displays
- detailed descriptions
- literature review
- high density
- electrical properties
- transmission electron microscopy
- x ray
- software development
- knowledge management