Toru Matsumoto

Publication Activity (10 Years)

Years Active: 2009-2013
Publications (10 Years): 0

Top Topics

High Resolution

Diffusion Process

Simulation Software

Defect Detection

Top Venues

Microelectron. Reliab.

Publications

Yasunori Goto, Toru Matsumoto, Kiyoshi Nikawa
Observation of impurity diffusion defect in IGBT using a laser terahertz emission microscope technique. Microelectron. Reliab. 53 (9-11) (2013)
Kiyoshi Nikawa, Masatsugu Yamashita, Toru Matsumoto, Katsuyoshi Miura, Yoshihiro Midoh, Koji Nakamae
The combinational or selective usage of the laser SQUID microscope, the non-bias laser terahertz emission microscope, and fault simulations in non-electrical-contact fault localization. Microelectron. Reliab. 51 (9-11) (2011)
Masatsugu Yamashita, Chiko Otani, Sunmi Kim, Hironaru Murakami, Masayoshi Tonouchi, Toru Matsumoto, Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, Kiyoshi Nikawa
Laser THz emission microscope as a novel tool for LSI failure analysis. Microelectron. Reliab. 49 (9-11) (2009)
Kiyoshi Nikawa, Shoji Inoue, Tatsuoki Nagaishi, Toru Matsumoto, Katsuyoshi Miura, Koji Nakamae
New Approach of Laser-SQUID Microscopy to LSI Failure Analysis. IEICE Trans. Electron. (3) (2009)