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Observation of impurity diffusion defect in IGBT using a laser terahertz emission microscope technique.
Yasunori Goto
Toru Matsumoto
Kiyoshi Nikawa
Published in:
Microelectron. Reliab. (2013)
Keyphrases
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anisotropic diffusion
diffusion process
defect detection
simulation software
neural network
energy saving
social networks
computer vision
high resolution
visual inspection
laser scanning