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Observation of impurity diffusion defect in IGBT using a laser terahertz emission microscope technique.

Yasunori GotoToru MatsumotoKiyoshi Nikawa
Published in: Microelectron. Reliab. (2013)
Keyphrases
  • anisotropic diffusion
  • diffusion process
  • defect detection
  • simulation software
  • neural network
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  • computer vision
  • high resolution
  • visual inspection
  • laser scanning