Laser THz emission microscope as a novel tool for LSI failure analysis.
Masatsugu YamashitaChiko OtaniSunmi KimHironaru MurakamiMasayoshi TonouchiToru MatsumotoYoshihiro MidohKatsuyoshi MiuraKoji NakamaeKiyoshi NikawaPublished in: Microelectron. Reliab. (2009)