Martin Lemberger

Publication Activity (10 Years)

Years Active: 2001-2007
Publications (10 Years): 0

Publications

Albena Paskaleva, Martin Lemberger, Anton J. Bauer
Polarity asymmetry of stress and charge trapping behavior of thin Hf- and Zr-silicate layers. Microelectron. Reliab. 47 (12) (2007)
Martin Lemberger, A. Baunemann, Anton J. Bauer
Chemical vapor deposition of tantalum nitride films for metal gate application using TBTDET and novel single-source MOCVD precursors. Microelectron. Reliab. 47 (4-5) (2007)
Albena Paskaleva, Anton J. Bauer, Martin Lemberger
O films. Microelectron. Reliab. 45 (7-8) (2005)
Martin Lemberger, Albena Paskaleva, Stefan Zürcher, Anton J. Bauer, Lothar Frey, Heiner Ryssel
Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor. Microelectron. Reliab. 45 (5-6) (2005)
Albena Paskaleva, Martin Lemberger, Stefan Zürcher, Anton J. Bauer, Lothar Frey, Heiner Ryssel
Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors. Microelectron. Reliab. 43 (8) (2003)
Michael P. M. Jank, Martin Lemberger, Anton J. Bauer, Lothar Frey, Heiner Ryssel
Electrical reliability aspects of through the gate implanted MOS structures with thin oxides. Microelectron. Reliab. 41 (7) (2001)