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Stefan Zürcher
Publication Activity (10 Years)
Years Active: 2003-2005
Publications (10 Years): 0
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Publications
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Martin Lemberger
,
Albena Paskaleva
,
Stefan Zürcher
,
Anton J. Bauer
,
Lothar Frey
,
Heiner Ryssel
Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor.
Microelectron. Reliab.
45 (5-6) (2005)
Albena Paskaleva
,
Martin Lemberger
,
Stefan Zürcher
,
Anton J. Bauer
,
Lothar Frey
,
Heiner Ryssel
Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors.
Microelectron. Reliab.
43 (8) (2003)