A. Baunemann

Publication Activity (10 Years)

Years Active: 2007-2007
Publications (10 Years): 0

Publications

Martin Lemberger, A. Baunemann, Anton J. Bauer
Chemical vapor deposition of tantalum nitride films for metal gate application using TBTDET and novel single-source MOCVD precursors. Microelectron. Reliab. 47 (4-5) (2007)