Login / Signup

Polarity asymmetry of stress and charge trapping behavior of thin Hf- and Zr-silicate layers.

Albena PaskalevaMartin LembergerAnton J. Bauer
Published in: Microelectron. Reliab. (2007)
Keyphrases
  • high frequency
  • sentiment analysis
  • positive or negative
  • behavior patterns
  • leakage current
  • information retrieval
  • database
  • three dimensional
  • multiresolution
  • power consumption
  • multi layer