Martin Kleindienst

Publication Activity (10 Years)

Years Active: 2014-2021
Publications (10 Years): 2

Top Topics

Parameter Tuning

Sliding Mode Control

Efficient Processing

Top Venues

IEEE Trans. Control. Syst. Technol.

Publications

Stefan Koch, Martin Kleindienst, Jaime A. Moreno, Martin Horn
Sliding Mode Control of a Distributed-Parameter Wafer Spin Clean Process. IEEE Trans. Control. Syst. Technol. 29 (5) (2021)
Martin Kleindienst, Stefan Koch, Markus Reichhartinger
Model-based Temperature Control of a Continuous Flow Heater for Efficient Processing of Silicon Wafers. CCTA (2020)
Martin Kleindienst, Markus Reichhartinger, Martin Horn, Elio Usai
An application of computer aided parameter tuning of a super-twisting sliding mode controller. VSS (2014)