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Sliding Mode Control of a Distributed-Parameter Wafer Spin Clean Process.

Stefan KochMartin KleindienstJaime A. MorenoMartin Horn
Published in: IEEE Trans. Control. Syst. Technol. (2021)
Keyphrases
  • sliding mode control
  • genetic algorithm
  • support vector machine
  • particle swarm optimization
  • dynamic model
  • wastewater treatment plant