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Model-based Temperature Control of a Continuous Flow Heater for Efficient Processing of Silicon Wafers.
Martin Kleindienst
Stefan Koch
Markus Reichhartinger
Published in:
CCTA (2020)
Keyphrases
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efficient processing
temperature control
control algorithm
query processing
range queries
efficient implementation
decision making
pid controller
join algorithms
evolutionary algorithm
information extraction
information retrieval systems