Microelectrode array fabrication by electrical discharge machining and chemical etching.
Timothy FofonoffSylvain MartelNicholas G. HatsopoulosJohn P. DonoghueIan W. HunterPublished in: IEEE Trans. Biomed. Eng. (2004)
Keyphrases
- integrated circuit
- plasma etching
- magnetic recording
- electrical properties
- high speed
- printed circuit boards
- high density
- thin film
- focal plane
- electron beam
- power grid
- low density
- programmable logic
- computer simulation
- physical characteristics
- drug discovery
- distribution networks
- computer engineering
- electronic circuits
- transmission line
- electrical activity
- electrical energy
- power transmission
- case study
- semiconductor devices
- linear array
- neural fuzzy
- tool wear