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Characterization of oxide trap density with the charge pumping technique in dual-layer gate oxide.
Younghwan Son
Yoon Kim
Myounggon Kang
Published in:
IEICE Electron. Express (2017)
Keyphrases
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silicon dioxide
space charge
metal oxide
leakage current
fuel cell
high temperature
silicon nitride
room temperature
field effect transistors
si sio
electron microscopy
x ray
information retrieval
databases
electrical properties
clustering algorithm
artificial intelligence