Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display.
Dedong HanYi WangShengdong ZhangLei SunRuqi HanSatoru MatsumotoYuji InoPublished in: Sci. China Inf. Sci. (2012)
Keyphrases
- thin film
- chemical vapor deposition
- high density
- electron microscopy
- liquid crystal displays
- film thickness
- silicon nitride
- rf sputtering
- plasma etching
- thin film transistor
- low density
- multi layer
- short circuit
- magnetic field
- data center
- room temperature
- grain size
- white light interferometry
- electrical properties
- integrated circuit
- electron beam
- fuzzy logic
- databases
- solar cell
- single image
- color images
- artificial neural networks
- machine learning