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Cylindrical micro touch sensor with a piezoelectric thin film for microbial separation.
Fumihito Arai
Kouhei Motoo
Paul G. R. Kwon
Toshio Fukuda
Akihiko Ichikawa
Tohoru Katsuragi
Published in:
Robotica (2005)
Keyphrases
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thin film
sensor data
high density
sensor networks
short circuit
high voltage
multi layer
electron microscopy
grain size
solar cell
plasma etching
sequence data
room temperature
high throughput
multi sensor
sound source
chemical vapor deposition
high speed