Measurement Procedures for the Electrical Characterization of Oxide Thin Films.

Alessio Carullo Sabrina Grassini Marco Parvis

Published in: IEEE Trans. Instrum. Meas. (2009)

Keyphrases

thin film
silicon nitride
electrical properties
short circuit
room temperature
electron microscopy
film thickness
high density
plasma etching
transmission line
solar cell
silicon dioxide
grain size
fuel cell
multi layer
chemical vapor deposition
fuzzy logic
range images