Trial fabrication of micron sized arm using reversible TiNi alloy thin film actuators.
Katsutoshi KuribayashiSeiji ShimizuT. NishinoharaTakao TaniguchiM. YoshitakeS. OgawaPublished in: IROS (1993)
Keyphrases
- thin film
- high density
- room temperature
- electron beam
- plasma etching
- chemical vapor deposition
- control system
- cellular automata
- markov chain
- low density
- mathematical model
- data center
- x ray
- integrated circuit
- electron microscopy
- short circuit
- degrees of freedom
- mechanical properties
- multi layer
- liquid crystal displays
- design parameters
- high speed
- decision makers
- grain size
- solar cell
- cloud computing
- database
- cmos technology
- neural network