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Impact of spacer interface charges on performance and reliability of low temperature transistors for 3D sequential integration.

Tadeu Mota FrutuosoJose Lugo-AlvarezXavier GarrosLaurent BrunetJoris LacordLouis GerrerMikaël CasséEdoardo CatapanoClaire Fenouillet-BérangerFrançois AndrieuFred GaillardPhilippe Ferrari
Published in: IRPS (2021)
Keyphrases
  • power consumption
  • user interface
  • information integration
  • data integration
  • integrated circuit
  • high density
  • high impact
  • visual interface
  • object oriented
  • high speed
  • reliability analysis