Impact of spacer interface charges on performance and reliability of low temperature transistors for 3D sequential integration.
Tadeu Mota FrutuosoJose Lugo-AlvarezXavier GarrosLaurent BrunetJoris LacordLouis GerrerMikaël CasséEdoardo CatapanoClaire Fenouillet-BérangerFrançois AndrieuFred GaillardPhilippe FerrariPublished in: IRPS (2021)