Backside PDN and 2.5D MIMCAP to Double Boost 2D and 3D ICs IR-Drop beyond 2nm Node.

R. Chen Giuliano Sisto Michele Stucchi Anne Jourdain Kenichi Miyaguchi Pieter Schuddinck P. Woeltgens H. Lin Naveen Kakarla A. Veloso Dragomir Milojevic Odysseas Zografos Pieter Weckx Geert Hellings Geert Van der Plas Julien Ryckaert Eric Beyne

Published in: VLSI Technology and Circuits (2022)

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