Backside PDN and 2.5D MIMCAP to Double Boost 2D and 3D ICs IR-Drop beyond 2nm Node.
R. ChenGiuliano SistoMichele StucchiAnne JourdainKenichi MiyaguchiPieter SchuddinckP. WoeltgensH. LinNaveen KakarlaA. VelosoDragomir MilojevicOdysseas ZografosPieter WeckxGeert HellingsGeert Van der PlasJulien RyckaertEric BeynePublished in: VLSI Technology and Circuits (2022)