Similarity searching for fault diagnosis of defect patterns in wafer bin maps.
Rui WangSonghao WangPublished in: Comput. Ind. Eng. (2023)
Keyphrases
- fault diagnosis
- similarity searching
- similarity search
- expert systems
- fault detection
- neural network
- chemical process
- monitoring and fault diagnosis
- electronic equipment
- fuzzy logic
- metric space
- fault detection and diagnosis
- power transformers
- multiple faults
- multi sensor information fusion
- chemical structures
- analog circuits
- data mining techniques
- rotating machinery
- condition monitoring
- power plant
- query processing
- control system
- gas turbine
- multimedia databases
- access methods
- data sets
- search tools
- artificial intelligence
- multiresolution
- multi dimensional