Impact of oxide liner properties on TSV Cu pumping and TSV stress.

Joke De Messemaeker O. Varela Pedreira A. Moussa Nabi Nabiollahi Kris Vanstreels Stefaan Van Huylenbroeck Harold Philipsen Patrick Verdonck Bart Vandevelde Ingrid De Wolf Eric Beyne Kris Croes

Published in: IRPS (2015)

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