-Si films.

Bo-Ching He Hua-Chiang Wen Meng-Hung Lin Yi-Shao Lai Wen-Fa Wu Chang-Pin Chou

Published in: Microelectron. Reliab. (2010)

Keyphrases

metal oxide
chemical vapor deposition
x ray
thin film
si sio
solid state
high speed
leakage current
plasma etching
high density
gate dielectrics
artificial neural networks
data structure
objective function
film restoration
image sequences
feature selection