Low-Temperature Deposition of Yttrium Oxide on Flexible PET Films Using Time-Separated Yttrium Precursor and Oxidizer Injections.
Kentaro SaitoKazuki YoshidaMasanori MiuraKensaku KanomataBashir AhmmadShigeru KubotaFumihiko HirosePublished in: IEICE Trans. Electron. (2022)