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Kensaku Kanomata
Publication Activity (10 Years)
Years Active: 2013-2022
Publications (10 Years): 3
Top Topics
Si Sio
Room Temperature
Film Thickness
Chemical Vapor Deposition
Top Venues
IEICE Trans. Electron.
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Publications
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Kentaro Saito
,
Kazuki Yoshida
,
Masanori Miura
,
Kensaku Kanomata
,
Bashir Ahmmad
,
Shigeru Kubota
,
Fumihiko Hirose
Low-Temperature Atomic Layer Deposition of AlN Using Trimethyl Aluminum and Plasma Excited Ar Diluted Ammonia.
IEICE Trans. Electron.
(10) (2022)
Kentaro Saito
,
Kazuki Yoshida
,
Masanori Miura
,
Kensaku Kanomata
,
Bashir Ahmmad
,
Shigeru Kubota
,
Fumihiko Hirose
Low-Temperature Deposition of Yttrium Oxide on Flexible PET Films Using Time-Separated Yttrium Precursor and Oxidizer Injections.
IEICE Trans. Electron.
(10) (2022)
Kentaro Tokoro
,
Shunsuke Saito
,
Kensaku Kanomata
,
Masanori Miura
,
Bashir Ahmmad
,
Shigeru Kubota
,
Fumihiko Hirose
Using Tetramethyltin and Its Application to TFT Fabrication.
IEICE Trans. Electron.
(5) (2018)
P. Pungboon Pansila
,
Kensaku Kanomata
,
Bashir Ahmmad
,
Shigeru Kubota
,
Fumihiko Hirose
Nitrogen Adsorption of Si(100) Surface by Plasma Excited Ammonia.
IEICE Trans. Electron.
(5) (2015)
P. Pungboon Pansila
,
Kensaku Kanomata
,
Bashir Ahmmad
,
Shigeru Kubota
,
Fumihiko Hirose
Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy.
IEICE Trans. Electron.
(5) (2015)
Katsuaki Momiyama
,
Kensaku Kanomata
,
Shigeru Kubota
,
Fumihiko Hirose
Films on Si(111) Using Solid-Phase Growth Reaction from Fe and FeSi Sources.
IEICE Trans. Electron.
(5) (2013)
Shigeru Kubota
,
Kensaku Kanomata
,
Katsuaki Momiyama
,
Takahiko Suzuki
,
Fumihiko Hirose
Robust Design Method of Multilayer Antireflection Coating for Organic Solar Cells.
IEICE Trans. Electron.
(4) (2013)