Films on Si(111) Using Solid-Phase Growth Reaction from Fe and FeSi Sources.
Katsuaki MomiyamaKensaku KanomataShigeru KubotaFumihiko HirosePublished in: IEICE Trans. Electron. (2013)
Keyphrases
- metal oxide
- chemical vapor deposition
- finite element
- three dimensional
- x ray
- learning phase
- case study
- data model
- data sources
- information sources
- databases
- grain size
- multiple sources
- training phase
- experimental data
- preprocessing phase
- phase unwrapping
- knowledge sources
- mr images
- knowledge base
- genetic algorithm
- information retrieval