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P. Pungboon Pansila
Publication Activity (10 Years)
Years Active: 2015-2015
Publications (10 Years): 2
Top Topics
Chemical Vapor Deposition
Volumetric Data
Plasma Etching
Room Temperature
Top Venues
IEICE Trans. Electron.
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Publications
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P. Pungboon Pansila
,
Kensaku Kanomata
,
Bashir Ahmmad
,
Shigeru Kubota
,
Fumihiko Hirose
Nitrogen Adsorption of Si(100) Surface by Plasma Excited Ammonia.
IEICE Trans. Electron.
(5) (2015)
P. Pungboon Pansila
,
Kensaku Kanomata
,
Bashir Ahmmad
,
Shigeru Kubota
,
Fumihiko Hirose
Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy.
IEICE Trans. Electron.
(5) (2015)