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Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy.
P. Pungboon Pansila
Kensaku Kanomata
Bashir Ahmmad
Shigeru Kubota
Fumihiko Hirose
Published in:
IEICE Trans. Electron. (2015)
Keyphrases
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room temperature
thin film
electron microscopy
multi layer
information retrieval
film thickness
chemical vapor deposition
infrared
high density
plasma etching
x ray
information retrieval systems
magnetic field
text retrieval
query expansion
ir evaluation
neural network
spectral data
nuclear magnetic resonance