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Nitrogen Adsorption of Si(100) Surface by Plasma Excited Ammonia.
P. Pungboon Pansila
Kensaku Kanomata
Bashir Ahmmad
Shigeru Kubota
Fumihiko Hirose
Published in:
IEICE Trans. Electron. (2015)
Keyphrases
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si sio
scanning electron microscope
low energy electron
plasma etching
three dimensional
d objects
surface features
surface reconstruction
surface model
chemical vapor deposition
high energy
neural network
data sets
surface points
volumetric data
vector field
range images
multiresolution